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Gettering and defect engineering in semiconductor technology : 5th International autumn meeting : Papers.

Author: M Kittler; H Richter; H G Grimmeiss; Institut fur Halbleiterphysik Frankfurt.
Publisher: Sci-tech Publications, 1993.
Series: Diffusion and defect data part B solid state phenomena, vol 32-33
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: M Kittler; H Richter; H G Grimmeiss; Institut fur Halbleiterphysik Frankfurt.
ISBN: 3908450004 9783908450009
OCLC Number: 82007055
Notes: Also known as GADEST '93.
Described as proceedings.
Series Title: Diffusion and defect data part B solid state phenomena, vol 32-33

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