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Gettering and defect engineering in semiconductor technology : 5th International autumn meeting : Papers.

Author: M Kittler; H Richter; H G Grimmeiss; Institut fur Halbleiterphysik Frankfurt.
Publisher: Sci-tech Publications, 1993.
Series: Diffusion and defect data part B solid state phenomena, vol 32-33
Edition/Format:   Book : Conference publication : English
Database:WorldCat
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Genre/Form: Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: M Kittler; H Richter; H G Grimmeiss; Institut fur Halbleiterphysik Frankfurt.
ISBN: 3908450004 9783908450009
ISSN:0377-6883
OCLC Number: 82007055
Notes: Also known as GADEST '93
Described as proceedings
Series Title: Diffusion and defect data part B solid state phenomena, vol 32-33

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<http://www.worldcat.org/oclc/82007055>
library:oclcnum"82007055"
owl:sameAs<info:oclcnum/82007055>
rdf:typelibrary:Serial
rdf:typeschema:Book
schema:about
schema:about
schema:about
schema:about
schema:contributor
schema:contributor
schema:contributor
schema:contributor
schema:datePublished"1993"
schema:exampleOfWork<http://worldcat.org/entity/work/id/66686541>
schema:genre"Conference proceedings"
schema:inLanguage"en"
schema:issn"0377-6883"
schema:name"Gettering and defect engineering in semiconductor technology : 5th International autumn meeting : Papers."
schema:publisher
schema:url
schema:workExample
umbel:isLike

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