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| Additional Physical Format: | Online version: Ellis, Kenneth Alexander. Growth and properties of silicon oxide and oxynitride gate dielectric. c1998 (OCoLC)692145116 |
|---|---|
| Material Type: | Thesis/dissertation, Manuscript |
| Document Type: | Book, Archival Material |
| All Authors / Contributors: |
Kenneth Alexander Ellis |
| OCLC Number: | 41903605 |
| Description: | xvi, 288 leaves : ill. ; 29 cm. |
| Responsibility: | by Kenneth Alexander Ellis. |
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