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Handbook of optical metrology : principles and applications

Author: Tōru Yoshizawa
Publisher: Boca Raton : CRC Press, ©2009.
Edition/Format:   Book : EnglishView all editions and formats
Database:WorldCat
Summary:

Discusses fundamental principles and techniques, exploring practical applications of optical methods. This handbook contains thirty chapters divided into three sections such as: Fundamental of  Read more...

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Genre/Form: Handbooks, manuals, etc
Aufsatzsammlung
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Tōru Yoshizawa
ISBN: 9780849337604 0849337607
OCLC Number: 149650317
Description: xiii, 730 pages : illustrations ; 27 cm
Contents: Part I: Fundamentals of optical elements and devices --
Light sources / Natalia Dushkina --
Lenses, prisms, and mirrors / Peter R. Hall --
Optoelectronic sensors / Motohiro Suyama --
Optical devices and optomechanical elements / Akihiko Chaki, Kenji Magara --
Part II: Fundamentals of principles and techniques for metrology --
Propagation of light / Natalie Dushkina --
Interferometry / David A. Page --
Holography / Giancarlo Pedrini --
Speckle methods and applications / Nandigana Krishna Mohan --
Moire Metrology / Lianhua Jin --
Optical heterodyne measurement method / Masao Hiramo --
Diffraction / Toru Yoshizawa --
Light scattering / Lev T. Perelman --
Polarization / Michael Shribak --
Near-field optics / Wenhao Huang, Xi Li, Guoyong Zhang --
Length and size / René Schödel --
Part III: Practical applications --
Displacement / Akiko Hirai, Mariko Kajima, Souichi Telada --
Straightness and alignment / Ruedi Thalmann --
Flatness / Toshiyuki Takatsuji, Youichi Bitou --
Surface profilometry / Toru Yoshizawa, Toshitaka Wakayama --
Three-dimensional shape measurement / Frank Chen, Gordon M. Brown, Mumin Song --
Fringe analysis / Jun-ichi Kato --
Photogrammetry / Nobuo Kochi --
Optical methods in solid mechanics / Anand Asundi --
Optical methods in flow management / Sang Joon Lee --
Polarimetry / Baoliang Wang --
Birefringence measurement / Yukitoshi Otani --
Ellipsometry / Hiroyuki Fujiwara --
Optical thin film and coatings / Chen-Chung Lee, Shigetaro Ogura --
Film surface and thickness profilometry / Katsuichi Kitagawa --
On-machine measurements / Takashi Nomura, Kazuhide Kamiya.
Responsibility: edited by Toru Yoshizawa.
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