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Handbook of optical metrology : principles and applications

Author: Tōru Yoshizawa
Publisher: Boca Raton : CRC Press, ©2009.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
Summary:
"The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked a comprehensive handbook, one providing an overview of optical metrology that covers practical  Read more...
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Genre/Form: Handbooks and manuals
Aufsatzsammlung
Handbooks, manuals, etc
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Tōru Yoshizawa
ISBN: 9780849337604 0849337607
OCLC Number: 149650317
Description: xiii, 730 pages : illustrations ; 27 cm
Contents: Part I: Fundamentals of optical elements and devices --
Light sources / Natalia Dushkina --
Lenses, prisms, and mirrors / Peter R. Hall --
Optoelectronic sensors / Motohiro Suyama --
Optical devices and optomechanical elements / Akihiko Chaki, Kenji Magara --
Part II: Fundamentals of principles and techniques for metrology --
Propagation of light / Natalie Dushkina --
Interferometry / David A. Page --
Holography / Giancarlo Pedrini --
Speckle methods and applications / Nandigana Krishna Mohan --
Moire Metrology / Lianhua Jin --
Optical heterodyne measurement method / Masao Hiramo --
Diffraction / Toru Yoshizawa --
Light scattering / Lev T. Perelman --
Polarization / Michael Shribak --
Near-field optics / Wenhao Huang, Xi Li, Guoyong Zhang --
Length and size / René Schödel --
Part III: Practical applications --
Displacement / Akiko Hirai, Mariko Kajima, Souichi Telada --
Straightness and alignment / Ruedi Thalmann --
Flatness / Toshiyuki Takatsuji, Youichi Bitou --
Surface profilometry / Toru Yoshizawa, Toshitaka Wakayama --
Three-dimensional shape measurement / Frank Chen, Gordon M. Brown, Mumin Song --
Fringe analysis / Jun-ichi Kato --
Photogrammetry / Nobuo Kochi --
Optical methods in solid mechanics / Anand Asundi --
Optical methods in flow management / Sang Joon Lee --
Polarimetry / Baoliang Wang --
Birefringence measurement / Yukitoshi Otani --
Ellipsometry / Hiroyuki Fujiwara --
Optical thin film and coatings / Chen-Chung Lee, Shigetaro Ogura --
Film surface and thickness profilometry / Katsuichi Kitagawa --
On-machine measurements / Takashi Nomura, Kazuhide Kamiya.
Responsibility: edited by Toru Yoshizawa.
More information:

Abstract:

Discusses fundamental principles and techniques, exploring practical applications of optical methods. This handbook contains thirty chapters divided into three sections such as: Fundamental of  Read more...

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   schema:reviewBody ""The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals." "Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications." "With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter, which makes this a valuable reference for all those involved with optical metrology."--Jacket." ;
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