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Handbook of optical metrology : principles and applications

Author: Tōru Yoshizawa
Publisher: Boca Raton : CRC Press, Taylor & Francis Group, [2015] ©2015
Edition/Format:   Print book : English : Second editionView all editions and formats
Summary:
This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters--nearly 100 pages--on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
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Genre/Form: Handbooks and manuals
Handbooks, manuals, etc
Document Type: Book
All Authors / Contributors: Tōru Yoshizawa
ISBN: 9781466573598 1466573597
OCLC Number: 894149535
Description: xiii, 905 pages ; 27 cm
Contents: Chapter 1: Light Sources --
Chapter 2: Lenses, Prisms, and Mirrors --
Chapter 3: Optoelectronic Sensors --
Chapter 4: Optical Devices and Optomechanical Elements --
Chapter 5: Propagation of Light --
Chapter 6: Interferometry --
Chapter 7: Holography --
Chapter 8: Speckle Methods and Applications --
Chapter 9: Moir©♭ Metrology --
Chapter 10: Optical Heterodyne Measurement Method --
Chapter 11: Diffraction --
Chapter 12: Light Scattering --
Chapter 13: Polarization --
Chapter 14: Near-Field Optics --
Chapter 15: Length and Size --
Chapter 16: Displacement --
Chapter 17: Straightness and Alignment --
Chapter 18: Flatness; --
Chapter 19: Surface Profilometry --
Chapter 20: Three-Dimensional Shape Measurement --
Chapter 21: Fringe Analysis --
Chapter 22: Photogrammetry --
Chapter 23: Optical Methods in Solid Mechanics --
Chapter 24: Optical Methods in Flow Measurement --
Chapter 25: Polarimetry --
Chapter 26: Birefringence Measurement --
Chapter 27: Ellipsometry --
Chapter 28: Optical Thin Film and Coatings --
Chapter 29: Film Surface and Thickness Profilometry --
Chapter 30: Optical Coherence Tomography for Industrial Applications --
Chapter 31: Interference Microscopy for Surface Structure Analysis --
Chapter 32: Noncontact Dimensional and Profile Metrology by Video Measurement --
Chapter 33: Optical Metrology in Manufacturing Technology --
Chapter 34: On-Machine Measurements
Responsibility: edited by Toru Yoshizawa, NPO 3D Associates, Yokohama, Japan.

Abstract:

This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters--nearly 100 pages--on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

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"... a good reference book for engineers and scientists in general and particularly for those who are not experts in the field of optical metrology. The broad collection of metrology applications and Read more...

 
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