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Helium ion microscopy : principles and applications

Author: David C Joy
Publisher: New York : Springer, 2013.
Series: SpringerBriefs in materials
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions such as the Helium Ion Microscope (HIM) are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Joy, David C.
Helium Ion Microscopy : Principles and Applications.
Dordrecht : Springer, ©2013
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: David C Joy
ISBN: 9781461486602 1461486602 1461486599 9781461486596
OCLC Number: 859396044
Description: 1 online resource (viii, 64 pages) : illustrations.
Contents: Introduction to Helium Ion Microscopy --
Microscopy with Ions: A Brief History --
Operating the Helium Ion Microscope --
Ion-Solid Interactions and Image Formation --
Charging and Damage --
Microanalysis with HIM --
Ion-Generated Damage --
Working with Other Ion beams --
Patterning and Nanofabrication.
Series Title: SpringerBriefs in materials
Responsibility: David C. Joy.

Abstract:

Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions - such as the Helium Ion Microscope  Read more...

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From the reviews:"Helium Ion Microscopy, Principles and Applications, is a compact volume of 64 pages, and is useful to anyone wishing fundamental knowledge on this topic. ... There are many features Read more...

 
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