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IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : January 20-24, 2013, Taipei International Convention Center, Taipei, Taiwan

Author: Toshiyuki Tsuchiya; Gwo-Bin Lee; Institute of Electrical and Electronics Engineers.
Publisher: Piscataway, N.J. : IEEE, ©2013.
Edition/Format:   eBook : Document : Conference publication : English
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Toshiyuki Tsuchiya; Gwo-Bin Lee; Institute of Electrical and Electronics Engineers.
OCLC Number: 860759379
Notes: "IEEE Catalog Number: CFP13MEM-ART."
Title from title screen, viewed May 29, 2013.
Description: 1 online resource : illustrations
Other Titles: Twenty-sixth IEEE International Conference on Micro Electro Mechanical Systems
MEMS 2013
26th IEEE International Conference on Micro Electro Mechanical Systems
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Responsibility: general co-chairs, Gwo-Bin Vincent Lee and Toshiyuki Tsuchiya.

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