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IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Travemünde, Germany, 4 February-7 February 1992

Author: W Benecke; H -C Petzold; IEEE Robotics and Automation Society.; Institute of Electrical and Electronics Engineers. German Section.
Publisher: [New York] : Institute of Electrical and Electronics Engineers, 1992.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
IEEE Workshop on Micro Electro Mechanical Systems (1992 : Travemünde, Lübeck, Germany).
IEEE micro electro mechanical systems.
[New York] : Institute of Electrical and Electronics Engineers, 1992
(DLC) 91058683
(OCoLC)26858357
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: W Benecke; H -C Petzold; IEEE Robotics and Automation Society.; Institute of Electrical and Electronics Engineers. German Section.
ISBN: 0780304977 9780780304970 0780304985 9780780304987 0780304993 9780780304994
OCLC Number: 47882548
Notes: "IEEE catalog number 92CH3093-2."
Description: 1 online resource (xv, 240 pages) : illustrations
Other Titles: IEEE Micro Electro Mechanical Systems Workshop
MEMS '92
Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings, "An investigation of micro structures, sensors, actuators, machines and robot", IEEE
Responsibility: W. Benecke, H.-C. Petzold, eds. ; sponsored by the IEEE Robotics and Automation Society and in cooperation with the German IEEE Section.

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