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IEEE micro electro mechanical systems : an investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994

Author: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Micromachine Center (Japan)
Publisher: [New York] : [Institute of Electrical and Electronics Engineers], 1994.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan).
IEEE micro electro mechanical systems.
[New York : Institute of Electrical and Electronics Engineers], 1994
(OCoLC)747304591
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Micromachine Center (Japan)
ISBN: 078031834X 9780780318342 0780318331 9780780318335 0780318358 9780780318359
OCLC Number: 31818292
Notes: "IEEE Workshop on Micro Electro Mechanical Systems"--Page iii.
"IEEE catalog number 94CH3404-1."
Description: xiv, 360 pages : illustrations ; 30 cm
Other Titles: Micro Electro Mechanical Systems, 1994, MEMS '94, proceedings, IEEE Workshop on.
IEEE Micro Electro Mechanical Systems Workshop
MEMS '94
Micro electro mechanical systems
Responsibility: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.

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