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IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.

Author: IEEE Components, Hybrids, and Manufacturing Technology Society.; IEEE Electron Devices Society.; IEEE Reliability Society.; IEEE Solid-State Circuits Council.; Institute of Electrical and Electronics Engineers.
Publisher: New York, N.Y. : Institute of Electrical and Electronics Engineers, ©1988-
Edition/Format:   Journal, magazine : Periodical : EnglishView all editions and formats
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Genre/Form: Periodicals
Périodiques
Additional Physical Format: IEEE transactions on semiconductor manufacturing (Online)
(DLC) 2005212499
(OCoLC)60638452
Material Type: Periodical, Internet resource
Document Type: Journal / Magazine / Newspaper, Internet Resource
All Authors / Contributors: IEEE Components, Hybrids, and Manufacturing Technology Society.; IEEE Electron Devices Society.; IEEE Reliability Society.; IEEE Solid-State Circuits Council.; Institute of Electrical and Electronics Engineers.
ISSN:0894-6507
OCLC Number: 16152423
Notes: Title from cover.
Description: v. : ill. ; 28 cm.
Other Titles: IEEE transactions on semiconductor manufacturing
Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing
Transactions on semiconductor manufacturing
Semiconductor manufacturing

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