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IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society.

Author: Institute of Electrical and Electronics Engineers.
Publisher: New York, NY : IEEE
Edition/Format:   eJournal/eMagazine : Document : No Linguistic Content
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Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File, Journal / Magazine / Newspaper
All Authors / Contributors: Institute of Electrical and Electronics Engineers.
ISSN:1558-2345
OCLC Number: 163394430
Notes: Online-Ressource.
C!URL-Änderung(03-06-02)HZV!URL-Änderung(06-08-02).
Description: Online-Ressource.
Other Titles: Transactions on semiconductor manufacturing

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