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Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Author: Richard B Fair; Charles W Pearce; Jack Washburn; Materials Research Society. Fall Meeting
Publisher: Pittsburgh, Pa. : Materials Research Society, ©1985.
Series: Materials Research Society symposia proceedings, v. 36.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
Summary:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Impurity diffusion and gettering in silicon.
Pittsburgh, Pa. : Materials Research Society, ©1985
(OCoLC)654952278
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Richard B Fair; Charles W Pearce; Jack Washburn; Materials Research Society. Fall Meeting
ISBN: 0931837014 9780931837012
OCLC Number: 11971128
Notes: "Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Materials Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments.
Description: xiii, 284 pages ; 24 cm.
Series Title: Materials Research Society symposia proceedings, v. 36.
Responsibility: editors, Richard B. Fair, Charles W. Pearce, Jack Washburn.

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