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In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II : 23-24 September, 1998, Santa Clara, California

Author: Sergio AjuriaTim Z HossainSociety of Photo-optical Instrumentation Engineers.Solid State Technology (Organization)Electrochemical Society.All authors
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1998.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 3509.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

A collection of papers on in-line characterization techniques for performance and yield enhancement in microelectronic manufacturing. They cover: electrical/field emission techniques; optical and  Read more...

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Genre/Form: Conference papers and proceedings
Santa Clara (Calif., 1998)
Congresses
Additional Physical Format: Online version:
In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II.
Bellingham, Washington : SPIE, ©1998
(OCoLC)763151109
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Sergio Ajuria; Tim Z Hossain; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization); Electrochemical Society.; American Vacuum Society.
ISBN: 0819429686 9780819429681
OCLC Number: 39869199
Description: ix, 244 pages : illustrations ; 28 cm.
Contents: Plenary papers --
Electrical/field emission techniques --
Optical and EM-wave techniques --
Surface photovoltage techniques --
Computational techniques --
Novel techniques and applications.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3509.
Responsibility: Sergio Ajuria, Tim Z. Hossain, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, Solid State Technology, the Electrochemical Society, American Vacuum Society.

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