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In-situ-Messungen der mechanischen Spannungen in gesputterten Metall- und Oxidschichten

Author: Robert Jens Drese
Publisher: 2005.
Dissertation: Aachen, Techn. Hochsch., Diss., 2005.
Edition/Format:   Computer file : Thesis/dissertation : German
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Material Type: Thesis/dissertation, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Robert Jens Drese
OCLC Number: 163411046
Description: Online-Ressource
Responsibility: vorgelegt von Robert Jens Drese.

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