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Integrated chemical microsensor systems in CMOS technology

Author: Andreas Hierlemann
Publisher: Berlin : Springer, 2005.
Series: Microtechnology and MEMS.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Covers CMOS chemical microsensor systems. This book presents information on important issues related to the realization of chemical microsensors in CMOS technology. It also presents the fundamentals  Read more...

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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Andreas Hierlemann
ISBN: 3540237828 9783540237822
OCLC Number: 254248677
Description: IX, 229 Seiten : zahlreiche Illustrationen und Diagramme ; 24 cm.
Contents: Fundamentals of Chemical Sensing.- Microtechnology for Chemical Sensors.- Microfabricated Chemical Sensors.- CMOS Platform Technology for Chemical Sensors.- Outlook and Future Developments.
Series Title: Microtechnology and MEMS.
Responsibility: A. Hierlemann.
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