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Integrated chemical microsensor systems in CMOS technology

Author: A Hierlemann
Publisher: Berlin ; New York : Springer, ©2005.
Series: Microtechnology and MEMS.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Publication:Springer e-books
Database:WorldCat
Summary:
"This book, "Integrated Chemical Microsensor Systems in CMOS Technology," provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Hierlemann, A. (Andreas).
Integrated chemical microsensor systems in CMOS technology.
Berlin ; New York : Springer, ©2005
(DLC) 2004114045
(OCoLC)59616642
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: A Hierlemann
ISBN: 9783540273721 3540273727 3540237828 9783540237822
OCLC Number: 262677851
Description: 1 online resource (ix, 229 pages) : illustrations.
Contents: Fundamentals of Chemical Sensing --
Microtechnology for Chemical Sensors --
Microfabricated Chemical Sensors --
CMOS Platform Technology for Chemical Sensors --
Outlook and Future Developments.
Series Title: Microtechnology and MEMS.
Responsibility: A. Hierlemann.
More information:

Abstract:

Covers CMOS chemical microsensor systems. This book presents information on important issues related to the realization of chemical microsensors in CMOS technology. It also presents the fundamentals  Read more...

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