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Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia

Author: Diana Nyssonen; United States. National Bureau of Standards.
Publisher: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1984.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 480.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Diana Nyssonen; United States. National Bureau of Standards.
ISBN: 0892525150 9780892525157
OCLC Number: 11463239
Description: vi, 172 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 480.
Other Titles: Integrated circuit metrology 2.
Integrated circuit metrology two.
Responsibility: Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards.

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Primary Entity

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