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Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California

Author: William H Arnold; Society of Photo-optical Instrumentation Engineers.; SPIE Digital Library.
Publisher: Bellingham, Wash., USA : SPIE, ©1990.
Series: SPIE proceedings series, v. 1261; Proceedings of SPIE--the International Society for Optical Engineering, v. 1261.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: (OCoLC)21961349
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: William H Arnold; Society of Photo-optical Instrumentation Engineers.; SPIE Digital Library.
ISBN: 0819403083 9780819403087
OCLC Number: 63176256
Reproduction Notes: Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2005. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Description: viii, 528 pages : illustrations ; 28 cm.
Series Title: SPIE proceedings series, v. 1261; Proceedings of SPIE--the International Society for Optical Engineering, v. 1261.
Responsibility: William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering.

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Primary Entity

<http://www.worldcat.org/oclc/63176256> # Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California
    a schema:Book, schema:CreativeWork, schema:MediaObject ;
   library:oclcnum "63176256" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/1362002062#Place/bellingham_wash_usa> ; # Bellingham, Wash., USA
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
   schema:about <http://dewey.info/class/621.3815/> ;
   schema:about <http://id.worldcat.org/fast/975565> ; # Integrated circuits--Inspection
   schema:about <http://experiment.worldcat.org/entity/work/data/1362002062#Topic/integrated_circuits_inspection> ; # Integrated circuits--Inspection
   schema:about <http://id.worldcat.org/fast/975582> ; # Integrated circuits--Measurement
   schema:about <http://experiment.worldcat.org/entity/work/data/1362002062#Topic/integrated_circuits_measurement> ; # Integrated circuits--Measurement
   schema:bookFormat schema:EBook ;
   schema:contributor <http://viaf.org/viaf/127619765> ; # Society of Photo-optical Instrumentation Engineers.
   schema:contributor <http://viaf.org/viaf/61393504> ; # William H. Arnold
   schema:contributor <http://experiment.worldcat.org/entity/work/data/1362002062#Organization/spie_digital_library> ; # SPIE Digital Library.
   schema:copyrightYear "1990" ;
   schema:datePublished "1990" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/1362002062> ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:genre "Conference publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://worldcat.org/issn/0277-786X> ; # SPIE proceedings series,
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/1362002062#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/21961349> ;
   schema:name "Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California"@en ;
   schema:productID "63176256" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/63176256#PublicationEvent/bellingham_wash_usa_spie_1990> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/1362002062#Agent/spie> ; # SPIE
   schema:url <http://link.spie.org/PSISDG/1261/1> ;
   schema:workExample <http://worldcat.org/isbn/9780819403087> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/63176256> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/1362002062#Place/bellingham_wash_usa> # Bellingham, Wash., USA
    a schema:Place ;
   schema:name "Bellingham, Wash., USA" ;
    .

<http://experiment.worldcat.org/entity/work/data/1362002062#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/63176256> ; # Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California
   schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://id.worldcat.org/fast/975565> # Integrated circuits--Inspection
    a schema:Intangible ;
   schema:name "Integrated circuits--Inspection"@en ;
    .

<http://id.worldcat.org/fast/975582> # Integrated circuits--Measurement
    a schema:Intangible ;
   schema:name "Integrated circuits--Measurement"@en ;
    .

<http://viaf.org/viaf/127619765> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
   schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://viaf.org/viaf/61393504> # William H. Arnold
    a schema:Person ;
   schema:familyName "Arnold" ;
   schema:givenName "William H." ;
   schema:name "William H. Arnold" ;
    .

<http://worldcat.org/isbn/9780819403087>
    a schema:ProductModel ;
   schema:isbn "0819403083" ;
   schema:isbn "9780819403087" ;
    .

<http://worldcat.org/issn/0277-786X> # SPIE proceedings series,
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/63176256> ; # Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California
   schema:issn "0277-786X" ;
   schema:name "SPIE proceedings series," ;
    .

<http://www.worldcat.org/oclc/21961349>
    a schema:CreativeWork ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/63176256> ; # Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California
    .

<http://www.worldcat.org/title/-/oclc/63176256>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/63176256> ; # Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California
   schema:dateModified "2016-05-11" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


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