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International Conference on Micro- and Nano-Electronics 2014 : 6-10 October 2014, Zvenigorod, Russian Federation

Author: A A Orlikovskiĭ; SPIE (Society),
Publisher: Bellingham, Washington : SPIE, [2015]. ©2014
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 9440.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Summary:

Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.

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Genre/Form: Electronic books
Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
(OCoLC)904653458
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: A A Orlikovskiĭ; SPIE (Society),
OCLC Number: 903239932
Description: 1 online resource : illustrations (some color).
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 9440.
Responsibility: Alexander A. Orlikovsky, editor ; organized by, Institute of Physics and Technology (Russian Federation), JSC Mikron (Russian Federation) ; sponsored by Russian Foundation for Basic Researches (Russian Federation) [and 6 others] ; published by SPIE.

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