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Introduction to microfabrication

Author: Sami Franssila
Publisher: Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, ©2004.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Franssila, Sami.
Introduction to microfabrication.
Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, ©2004
(DLC) 2004004940
(OCoLC)53912486
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Sami Franssila
ISBN: 0470020563 9780470020562
OCLC Number: 57598337
Description: 1 online resource (xvii, 401 pages) : illustrations
Contents: Introduction to Microfabrication; Contents; Preface; Acknowledgements; PART I: INTRODUCTION; PART II: MATERIALS; PART III: BASIC PROCESSES; PART IV: STRUCTURES; PART V: INTEGRATION; PART VI: TOOLS; PART VII: MANUFACTURING; PART VIII: FUTURE; Appendix A: Comments and Hints to Selected Problems; Appendix B: Constants and Conversion Factors; Index.
Other Titles: Introduction to micro fabrication.
Responsibility: Sami Franssila.
More information:

Abstract:

Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring:. * A comprehensive presentation of basic fabrication processes. * An emphasis on materials and microstructures, rather than device physics.

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