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Introduction to microsystem design

Author: Werner Karl Schomburg
Publisher: Heidelberg : Springer, 2015.
Series: RWTH edition.
Edition/Format:   eBook : Document : English : Second editionView all editions and formats
Summary:
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Printed edition:
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Werner Karl Schomburg
ISBN: 9783662470237 3662470233 3662470225 9783662470220
OCLC Number: 912277113
Description: 1 online resource.
Contents: Scaling Laws --
Elastic deformations --
Thin Films --
Conductor Paths --
Electrical Measurements --
Membranes --
Strain gauges on membranes --
Beams --
Vibrations --
Capillaries --
Capacitive forces --
Piezoelectric effect --
Thermal actuators --
Micro optics --
Diffusion --
Micro valves --
Micro pumps --
Micro dosing --
Analogies of physical domains --
Mechanical devices for electronics.
Series Title: RWTH edition.
Responsibility: Werner Karl Schomburg.

Abstract:

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to  Read more...

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