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Introduction to semiconductor manufacturing technology

Author: Hong Xiao
Publisher: Upper Saddle River, N.J. : Prentice Hall, ©2001.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
Summary:

This text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It describes the complicated and new IC chip fabrication processes in  Read more...

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Document Type: Book
All Authors / Contributors: Hong Xiao
ISBN: 0130224049 9780130224040
OCLC Number: 44468957
Description: viii, 647 p. : ill. ; 24 cm.
Contents: 1. Introduction. 2. Introduction of IC Fabrication. 3. Semiconductor Basics. 4. Wafer Manufacturing. 5. Thermal Processes. 6. Photolithography. 7. Plasma Basics. 8. Ion Implantation. 9. Etch. 10. CVD and Dielectric Thin Film. 11. Metallization. 12. CMP (Chemical Mechanical Polishing). 13. Process Integration. 14. CMOS Processes. 15. Summary and Future Trends. Index.
Responsibility: Hong Xiao.

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