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Introduction to semiconductor technology

Author: Hong Xiao; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2012.
Series: SPIE monograph, PM220.; SPIE Digital Library.
Edition/Format:   eBook : Document : English : 2nd edView all editions and formats
Database:WorldCat
Summary:
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made  Read more...
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Details

Genre/Form: Electronic books
Additional Physical Format: Print version:
(DLC) 2012013231
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Hong Xiao; Society of Photo-optical Instrumentation Engineers.
ISBN: 9780819490933 0819490938 9781628701043 1628701048
OCLC Number: 801513077
Notes: "SPIE Digital Library."--Website.
Description: 1 online resource (xix, 656 pages) : illustrations, digital file.
Contents: Preface to the first edition --
Preface to the second edition --
Chapter 1. Introduction --
Chapter 2. Introduction to integrated circuit fabrication --
Chapter 3. Semiconductor basics --
Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering --
Chapter 5. Thermal processes --
Chapter 6. Photolithography --
Chapter 7. Plasma basics --
Chapter 8. Ion implantation --
Chapter 9. Etch --
Chapter 10. Chemical vapor deposition and dielectric thin films --
Chapter 11. Metallization --
Chapter 12. Chemical mechanical polishing --
Chapter 13. Process integration --
Chapter 14. Integrated circuit processing technologies --
Chapter 15. Future trends and summary.
Series Title: SPIE monograph, PM220.; SPIE Digital Library.
Responsibility: Hong Xiao.

Abstract:

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations.
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