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Investigations of perspective materials for aggressively scaled gate stacks and contact structures of MOS devices

Author: Andriy Goryachko
Dissertation: Brandenburgische Techn. University, Diss., 2002--Cottbus.
Edition/Format:   Computer file : Thesis/dissertation : EnglishView all editions and formats
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Genre/Form: Online-Publikation
Material Type: Thesis/dissertation, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Andriy Goryachko
OCLC Number: 175099955
Description: Online-Ressource
Responsibility: vorgelegt von Andriy Goryachko.

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