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Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988

Author: Robert F Hochman; Hillary Solnick-Legg; Keith O Legg; ASM International. Ion Implantation Committee.; ASM International. Plasma Processes Committee.
Publisher: Metals Park, Ohio : ASM International, ©1988.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Robert F Hochman; Hillary Solnick-Legg; Keith O Legg; ASM International. Ion Implantation Committee.; ASM International. Plasma Processes Committee.
ISBN: 0871703300 9780871703309
OCLC Number: 19649434
Description: ix, 205 pages : illustrations ; 29 cm
Responsibility: edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International.

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