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Ion implantation in semiconductors

Author: D Stievenard; J C Bourgoin
Publisher: Aedermannsdorf, Switzerland : Trans Tech Publications ; Brookfield, VT : Distributed in North America by Trans Tech Publications, ©1988.
Series: Diffusion and defect data., Pt. B,, Solid state phenomena.
Edition/Format:   Print book : EnglishView all editions and formats
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Document Type: Book
All Authors / Contributors: D Stievenard; J C Bourgoin
ISBN: 0878495754 9780878495757
OCLC Number: 19349284
Notes: Articles previously published in Diffusion and defect data, pt. B : solid state phenomena.
Description: 473 pages : illustrations ; 25 cm.
Contents: Silicon --
Application to technology --
Compound semiconductors --
Heterostructures --
Hydrogen implantation --
Germanium.
Series Title: Diffusion and defect data., Pt. B,, Solid state phenomena.
Responsibility: D. Stievenard, J.C. Bourgoin.

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