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Ion implantation technology--98 : 1998 International Conference on Ion Implantation Technology proceedings, Kyoto, Japan, June 22-26, 1998

Author: J Matsuo; IEEE Electron Devices Society.
Publisher: Piscataway, N.J. : Institute of Electrical and Electronics Engineers, ©1999.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
International Conference on Ion Implantation Technology (12th : 1998 : Kyoto, Japan).
Ion implantation technology--98.
Piscataway, N.J. : Institute of Electrical and Electronics Engineers, ©1999
(DLC) 98084232
(OCoLC)43190101
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: J Matsuo; IEEE Electron Devices Society.
OCLC Number: 47881810
Notes: "98EX144"--Cover.
Cosponsors : Electron Devices Society, the IEEE ...
Description: 1 online resource (2 volumes) : illustrations
Other Titles: Iit '98 Kyoto
1998 International Conference on Ion Implantation Technology proceedings
Ion Implantation Technology proceedings, 1998 International Conference on
Responsibility: editors J. Matsuo [and others].

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