skip to content
ISSM 2010 : Tokyo, October 18-20, 2010, Hyatt Regency Tokyo, Shinjuku, Tokyo : ISSM 2010 conference proceedings, the Eighteenth International Symposium on Semiconductor Manufacturing, October 18-20, 2010 ... Preview this item
ClosePreview this item
Checking...

ISSM 2010 : Tokyo, October 18-20, 2010, Hyatt Regency Tokyo, Shinjuku, Tokyo : ISSM 2010 conference proceedings, the Eighteenth International Symposium on Semiconductor Manufacturing, October 18-20, 2010 ...

Author: Ōyō Butsuri Gakkai.
Publisher: [Piscataway, N.J.] : [Institute of Electrical and Electronics Engineers], [2010]
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

 

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
2010 ieee international symposium on semiconductor manufacturing.
New York : Ieee Press Books, 2010
(OCoLC)731901725
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Ōyō Butsuri Gakkai.
OCLC Number: 770428135
Description: 1 online resource : illustrations
Other Titles: Eighteenth International Symposium on Semiconductor Manufacturing
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
2010 International Symposium on Semiconductor Manufacturing (ISSM)
Responsibility: sponsored by the Japan Society of Applied Physics (JSAP) ; co-sponsored by IEEE Electron Devices Society, IEEE Components Packaging and Manufacturing Technology Society, Semiconductor Equipment and Materials International (SEMI).

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/770428135> # ISSM 2010 : Tokyo, October 18-20, 2010, Hyatt Regency Tokyo, Shinjuku, Tokyo : ISSM 2010 conference proceedings, the Eighteenth International Symposium on Semiconductor Manufacturing, October 18-20, 2010 ...
    a schema:Book, schema:CreativeWork, schema:MediaObject ;
   library:oclcnum "770428135" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nju> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/1069941659#Place/piscataway_n_j> ; # Piscataway, N.J.
   schema:about <http://experiment.worldcat.org/entity/work/data/1069941659#Topic/computer_integrated_manufacturing_systems> ; # Computer integrated manufacturing systems
   schema:about <http://experiment.worldcat.org/entity/work/data/1069941659#Topic/semiconductors_design_and_construction> ; # Semiconductors--Design and construction
   schema:about <http://id.worldcat.org/fast/1112134> ; # Semiconductor industry
   schema:about <http://id.loc.gov/authorities/subjects/sh85119894> ; # Semiconductor industry
   schema:about <http://id.worldcat.org/fast/1112213> ; # Semiconductors--Design and construction
   schema:about <http://id.worldcat.org/fast/872216> ; # Computer integrated manufacturing systems
   schema:alternateName "Semiconductor Manufacturing (ISSM), 2010 International Symposium on" ;
   schema:alternateName "2010 International Symposium on Semiconductor Manufacturing (ISSM)" ;
   schema:alternateName "Eighteenth International Symposium on Semiconductor Manufacturing" ;
   schema:bookFormat schema:EBook ;
   schema:contributor <http://viaf.org/viaf/155285960> ; # Ōyō Butsuri Gakkai.
   schema:creator <http://experiment.worldcat.org/entity/work/data/1069941659#Meeting/international_symposium_on_semiconductor_manufacturing_2010_tokyo_japan> ; # International Symposium on Semiconductor Manufacturing (2010 : Tokyo, Japan)
   schema:datePublished "2010" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/1069941659> ;
   schema:genre "Conference publication"@en ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:inLanguage "en" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/731901725> ;
   schema:name "ISSM 2010 : Tokyo, October 18-20, 2010, Hyatt Regency Tokyo, Shinjuku, Tokyo : ISSM 2010 conference proceedings, the Eighteenth International Symposium on Semiconductor Manufacturing, October 18-20, 2010 ..."@en ;
   schema:productID "770428135" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/770428135#PublicationEvent/piscataway_n_j_institute_of_electrical_and_electronics_engineers_2010> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/1069941659#Agent/institute_of_electrical_and_electronics_engineers> ; # [Institute of Electrical and Electronics Engineers]
   schema:url <http://ezproxy.uis.edu:2048/login?url=http://ieeexplore.ieee.org/servlet/opac?punumber=5741884> ;
   schema:url <http://ieeexplore.ieee.org/servlet/opac?punumber=5741884> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/770428135> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/1069941659#Agent/institute_of_electrical_and_electronics_engineers> # [Institute of Electrical and Electronics Engineers]
    a bgn:Agent ;
   schema:name "[Institute of Electrical and Electronics Engineers]" ;
    .

<http://experiment.worldcat.org/entity/work/data/1069941659#Meeting/international_symposium_on_semiconductor_manufacturing_2010_tokyo_japan> # International Symposium on Semiconductor Manufacturing (2010 : Tokyo, Japan)
    a bgn:Meeting, schema:Event ;
   schema:location <http://experiment.worldcat.org/entity/work/data/1069941659#Place/tokyo_japan> ; # Tokyo, Japan)
   schema:name "International Symposium on Semiconductor Manufacturing (2010 : Tokyo, Japan)" ;
    .

<http://experiment.worldcat.org/entity/work/data/1069941659#Place/piscataway_n_j> # Piscataway, N.J.
    a schema:Place ;
   schema:name "Piscataway, N.J." ;
    .

<http://id.loc.gov/authorities/subjects/sh85119894> # Semiconductor industry
    a schema:Intangible ;
   schema:name "Semiconductor industry"@en ;
    .

<http://id.worldcat.org/fast/1112134> # Semiconductor industry
    a schema:Intangible ;
   schema:name "Semiconductor industry"@en ;
    .

<http://id.worldcat.org/fast/1112213> # Semiconductors--Design and construction
    a schema:Intangible ;
   schema:name "Semiconductors--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/872216> # Computer integrated manufacturing systems
    a schema:Intangible ;
   schema:name "Computer integrated manufacturing systems"@en ;
    .

<http://viaf.org/viaf/155285960> # Ōyō Butsuri Gakkai.
    a schema:Organization ;
   schema:name "Ōyō Butsuri Gakkai." ;
    .

<http://www.worldcat.org/oclc/731901725>
    a schema:CreativeWork ;
   rdfs:label "2010 ieee international symposium on semiconductor manufacturing." ;
   schema:description "Print version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/770428135> ; # ISSM 2010 : Tokyo, October 18-20, 2010, Hyatt Regency Tokyo, Shinjuku, Tokyo : ISSM 2010 conference proceedings, the Eighteenth International Symposium on Semiconductor Manufacturing, October 18-20, 2010 ...
    .

<http://www.worldcat.org/title/-/oclc/770428135>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/770428135> ; # ISSM 2010 : Tokyo, October 18-20, 2010, Hyatt Regency Tokyo, Shinjuku, Tokyo : ISSM 2010 conference proceedings, the Eighteenth International Symposium on Semiconductor Manufacturing, October 18-20, 2010 ...
   schema:dateModified "2017-12-24" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.