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Journal of vacuum science & technology. B : an international journal devoted to microelectronics and nanometer structures ; processing, measurement and phenomena : JVST ; the official journal of the AVS

Author: American Vacuum Society.
Publisher: New York, NY : Inst.
Edition/Format:   Journal, magazine : Periodical : EnglishView all editions and formats
Database:WorldCat
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Material Type: Periodical
Document Type: Journal / Magazine / Newspaper
All Authors / Contributors: American Vacuum Society.
ISSN:1071-1023, 0734-211X
OCLC Number: 630221344
Other Titles: Journal of vacuum science & technology / B
Journal of vacuum science and technology
Microelectronics and nanometer structures
Microelectronics processing and phenomena
Responsibility: publ. by the American Institute of Physics.

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