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Journal of vacuum science & technology. B, Nanotechnology and microelectronics : materials, processing, measurement, and phenomena : JVST B.

Author: American Vacuum Society.; American Institute of Physics.
Publisher: New York : AVS through the American Institute of Physics, ©2010-
Edition/Format:   Journal, magazine : Periodical : EnglishView all editions and formats
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Genre/Form: Périodiques
Additional Physical Format: Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Material Type: Periodical
Document Type: Journal / Magazine / Newspaper
All Authors / Contributors: American Vacuum Society.; American Institute of Physics.
ISSN:2166-2746
OCLC Number: 848068510
Description: v. : ill
Other Titles: Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Nanotechnology and microelectronics
JVST B, nanotechnology and microelectronics
Journal of vacuum science and technology
Nanotechnology & microelectronics
Journal of vacuum science and technology.

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