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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena.

Publisher: New York : American Institute of Physics, 1991.
Edition/Format:   Journal, magazine : Periodical : English
Database:WorldCat
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Material Type: Periodical
Document Type: Journal / Magazine / Newspaper
ISSN:1071-1023
OCLC Number: 846855648
Description: v. : ill. ; 29 cm.

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