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Large Scale Integrated Circuits Technology: State of the Art and Prospects : Proceedings of the NATO Advanced Study Institute on "Large Scale Integrated Circuits Technology: State of the Art and Prospects", Erice, Italy, July 15.27, 1981

Author: Leo Esaki; Giovanni Soncini
Publisher: Dordrecht : Springer Netherlands, 1982.
Series: NATO advanced study institutes series., Series E,, Applied sciences ;, 55.
Edition/Format:   eBook : Bibliographic data : English
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Proceedings of the NATO Advanced Study Institute, Erice, Italy, July 15-27, 1981

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Genre/Form: Electronic books
Additional Physical Format: Printed edition:
Material Type: Bibliographic data, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Leo Esaki; Giovanni Soncini
ISBN: 9789400976450 9400976453 9789400976474 940097647X
OCLC Number: 840306378
Description: 1 online resource (784 pages).
Contents: I. Overview.- Semiconductor Devices and the Role of Physics in Their Development.- LSI: Prospects and Problems.- II. Silicon Technology.- Silicon Crystals for Large Scale Integrated Circuits.- Structural Techniques for Bulk Defects Characterization.- III. Processing.- Planar Processing: Silicon Oxidation.- Planar Processing: Diffusion.- Ion Implantation.- Silicon Epitaxy.- Computer Simulation of Complete IC Fabrication Process.- Beam Processing Techniques Applied to Crystal Silicon Substrates.- Lithography Systems for VLSI.- IV. Bipolar Devices.- Bipolar Linear Integrated Circuits.- Bipolar Digital Circuits.- Advanced Bipolar Devices and Related Problems.- V. Mos Devices.- MOS Technologies and Devices for LSI.- Silicon on Insulator Integrated Circuits.- Advanced Silicon MOS Devices and Related Problems.- VI. Reliability.- Semiconductor Component Accelerated Testing and Data Analysis.- Basic Integrated Circuit Failure Mechanisms.- VII. Future Trends.- Miniaturization Limits for MOS Technology.- Physics of Submicron Devices.- The Role of GaAs in High Speed Integrated Circuits.- Josephson Integrated Circuits.
Series Title: NATO advanced study institutes series., Series E,, Applied sciences ;, 55.
Other Titles: Proceedings of the NATO Advanced Study Institute, Erice, Italy, July 15-27, 1981
Responsibility: edited by Leo Esaki, Giovanni Soncini.

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