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Laser-assisted microtechnology

Author: S M Metev; V P Veĭko
Publisher: Berlin ; New York : Springer-Verlag, ©1994.
Series: Springer series in materials science, v. 19.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

This monograph demonstrates how laser technology can be applied to a wide variety of problems in microelectronic design and fabrication. It describes the micromachining of thin-films, maskless laser  Read more...

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Additional Physical Format: Online version:
Metev, S.M. (Simeon Metodiev).
Laser-assisted microtechnology.
Berlin ; New York : Springer-Verlag, ©1994
(OCoLC)623094136
Document Type: Book
All Authors / Contributors: S M Metev; V P Veĭko
ISBN: 3540539255 9783540539254 0387539255 9780387539256
OCLC Number: 30594581
Description: x, 240 pages : illustrations ; 25 cm.
Contents: 1. Introduction --
2. Laser-Based Equipment for Microtechnology --
3. Laser Micromachining of Thin Films --
4. Local Laser-Induced Heat Treatment --
5. Laser Melting and Microwelding --
6. Laser Microshaping --
7. Maskless Laser Micropatterning --
8. Pulsed Laser-Plasma Deposition of Thin Films and Film Structures.
Series Title: Springer series in materials science, v. 19.
Responsibility: Simeon M. Metev, Vadim P. Veiko.

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