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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

Author: R M Osgood; S R J Brueck; H R Schlossberg; United States. Air Force. Office of Scientific Research.
Publisher: New York : North-Holland, ©1983.
Series: Materials Research Society symposia proceedings, v. 17.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Laser diagnostics and photochemical processing for semiconductor devices.
New York : North-Holland, ©1983
(OCoLC)557670535
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: R M Osgood; S R J Brueck; H R Schlossberg; United States. Air Force. Office of Scientific Research.
ISBN: 0444007822 9780444007827
OCLC Number: 9440983
Notes: "Sponsored by the Air Force Office of Scientific Research"--Title page verso.
Description: xiii, 298 pages : illustrations ; 24 cm.
Series Title: Materials Research Society symposia proceedings, v. 17.
Responsibility: editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.

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