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Laser dimensional metrology : recent advances for industrial application : proceedings : 5-7 October 1993, Brighton, United Kingdom

Author: M J Downs; Sira Communications Ltd.; Institute of Physics (Great Britain). Advanced Optics Group.; et al
Publisher: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1994.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 2088.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Laser dimensional metrology.
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1994
(OCoLC)624386433
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: M J Downs; Sira Communications Ltd.; Institute of Physics (Great Britain). Advanced Optics Group.; et al
ISBN: 0819413593 9780819413598
OCLC Number: 29866870
Notes: "International Conference on Laser Dimensional Metrology, Photonex '93, was held at the Brighton Centre in October 1993"--P. ix.
Description: ix, 216 p. : ill. ; 28 cm.
Contents: Technology of measurement --
Components and subsystems --
Trends in industrial metrology --
Nanometrology applications --
Poster session.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 2088.
Responsibility: M.J. Downs, chair/editor ; organized by Sira Communications, Ltd. ; sponsored by Advanced Optics Group of the Institute of Physics ... [et al.].

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