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Laser microfabrication : thin film processes and lithography

Author: Daniel J Ehrlich; Jeffrey Y Tsao
Publisher: Boston : Academic Press, ©1989.
Edition/Format:   Print book : EnglishView all editions and formats
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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student  Read more...

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Additional Physical Format: Online version:
Laser microfabrication.
Boston : Academic Press, ©1989
(OCoLC)596565395
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Daniel J Ehrlich; Jeffrey Y Tsao
ISBN: 0122334302 9780122334306
OCLC Number: 18379020
Description: xii, 587 pages : illustrations ; 24 cm
Contents: Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu --
Laser-stimulated molecular processes on surfaces / T.J. Chuang --
Spectroscopy and photochemistry of gases, adsorbates, and liquids / M. Rothschild --
Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao --
Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao --
Laser etching / John J. Ritsko --
Laser deposition : energetics and chemical kinetics / R.L. Jackson [and others] --
Laser deposition : experimental approaches / J. Haigh and M.R. Aylett --
Epitaxy / S.J.C. Irvine --
Doping and oxidation / Ian W. Boyd.
Responsibility: edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.
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A good balance between science and practice, well-established and very new data....The importance of this monograph lies in the title itself, since microelectronics today is a driving force of Read more...

 
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