skip to content
Lasers in microlithography : 2-3 March 1987, Santa Clara, California Preview this item
ClosePreview this item
Checking...

Lasers in microlithography : 2-3 March 1987, Santa Clara, California

Author: Daniel J Ehrlich; Jeffrey Y Tsao; John Samuel Batchelder; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash., USA : The Society, ©1987.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 774.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
Lasers in microlithography.
Bellingham, Wash., USA : The Society, ©1987
(DLC) 87060742
(OCoLC)16880907
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Daniel J Ehrlich; Jeffrey Y Tsao; John Samuel Batchelder; Society of Photo-optical Instrumentation Engineers.
OCLC Number: 573767786
Reproduction Notes: Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Description: 1 online resource (iv [i.e. vi], 192 pages) : illustrations.
Details: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 774.
Responsibility: Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/573767786> # Lasers in microlithography : 2-3 March 1987, Santa Clara, California
    a schema:MediaObject, schema:Book, schema:CreativeWork ;
    library:oclcnum "573767786" ;
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/365675765#Place/bellingham_wash_usa> ; # Bellingham, Wash., USA
    schema:about <http://dewey.info/class/621.381531/e20/> ;
    schema:about <http://id.worldcat.org/fast/992853> ; # Lasers--Industrial applications
    schema:about <http://experiment.worldcat.org/entity/work/data/365675765#Topic/lasers_industrial_applications> ; # Lasers--Industrial applications
    schema:about <http://experiment.worldcat.org/entity/work/data/365675765#Topic/microlithography> ; # Microlithography
    schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
    schema:bookFormat schema:EBook ;
    schema:contributor <http://viaf.org/viaf/92398663> ; # Daniel J. Ehrlich
    schema:contributor <http://viaf.org/viaf/151856603> ; # Society of Photo-optical Instrumentation Engineers.
    schema:contributor <http://viaf.org/viaf/60636581> ; # Jeffrey Y. Tsao
    schema:contributor <http://viaf.org/viaf/276327478> ; # John Samuel Batchelder
    schema:copyrightYear "1987" ;
    schema:datePublished "1987" ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/365675765> ;
    schema:genre "Conference publication"@en ;
    schema:genre "Conference papers and proceedings"@en ;
    schema:inLanguage "en" ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/365675765#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
    schema:isPartOf <http://worldcat.org/issn/0277-786X> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/16880907> ;
    schema:name "Lasers in microlithography : 2-3 March 1987, Santa Clara, California"@en ;
    schema:productID "573767786" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/573767786#PublicationEvent/bellingham_wash_usa_the_society_1987> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/365675765#Agent/the_society> ; # The Society
    schema:url <http://uclibs.org/PID/118788> ;
    schema:url <http://catalog.hathitrust.org/api/volumes/oclc/16880907.html> ;
    schema:url <http://books.google.com/books?id=345WAAAAMAAJ> ;
    schema:url <http://proxy.library.carleton.ca/login?url=http://link.spie.org/PSISDG/0774/1> ;
    schema:url <http://proceedings.spiedigitallibrary.org/volume.aspx?volume=0774> ;
    schema:url <http://link.spie.org/PSISDG/0774/1> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/573767786> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/365675765#Place/bellingham_wash_usa> # Bellingham, Wash., USA
    a schema:Place ;
    schema:name "Bellingham, Wash., USA" ;
    .

<http://experiment.worldcat.org/entity/work/data/365675765#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/573767786> ; # Lasers in microlithography : 2-3 March 1987, Santa Clara, California
    schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://id.worldcat.org/fast/1019883> # Microlithography
    a schema:Intangible ;
    schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/992853> # Lasers--Industrial applications
    a schema:Intangible ;
    schema:name "Lasers--Industrial applications"@en ;
    .

<http://uclibs.org/PID/118788>
    rdfs:comment "SPIE Digital Library. Restricted to UC campuses" ;
    .

<http://viaf.org/viaf/151856603> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
    schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://viaf.org/viaf/276327478> # John Samuel Batchelder
    a schema:Person ;
    schema:familyName "Batchelder" ;
    schema:givenName "John Samuel" ;
    schema:name "John Samuel Batchelder" ;
    .

<http://viaf.org/viaf/60636581> # Jeffrey Y. Tsao
    a schema:Person ;
    schema:familyName "Tsao" ;
    schema:givenName "Jeffrey Y." ;
    schema:name "Jeffrey Y. Tsao" ;
    .

<http://viaf.org/viaf/92398663> # Daniel J. Ehrlich
    a schema:Person ;
    schema:familyName "Ehrlich" ;
    schema:givenName "Daniel J." ;
    schema:name "Daniel J. Ehrlich" ;
    .

<http://worldcat.org/issn/0277-786X> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/573767786> ; # Lasers in microlithography : 2-3 March 1987, Santa Clara, California
    schema:issn "0277-786X" ;
    schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://www.worldcat.org/oclc/16880907>
    a schema:CreativeWork ;
    rdfs:label "Lasers in microlithography." ;
    schema:description "Print version:" ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/573767786> ; # Lasers in microlithography : 2-3 March 1987, Santa Clara, California
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.