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Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.

Author: Union Carbide Corporation.; United States. Department of Energy.
Publisher: [Washington] : Dept. of Energy ; [Springfield, Va.] : [For sale by the National Technical Information Service], 1979-
Series: DOE/JPL, 954334-12; DRD, no. SE-6
Edition/Format:   Print book : National government publication : English
Database:WorldCat
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Material Type: Government publication, National government publication
Document Type: Book
All Authors / Contributors: Union Carbide Corporation.; United States. Department of Energy.
OCLC Number: 6567723
Notes: "DRL no. 81."
Contract no. NAS-7-100-954334.
Description: volumes : illustrations ; 28 cm.
Contents: Quarterly progress report, July --
Sept. 1979.
Series Title: DOE/JPL, 954334-12; DRD, no. SE-6

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<http://www.worldcat.org/oclc/6567723> # Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.
    a schema:CreativeWork, schema:Book ;
   library:oclcnum "6567723" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/2517394968#Place/washington> ; # Washington
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/dcu> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/2517394968#Place/springfield_va> ; # Springfield, Va.
   schema:about <http://id.worldcat.org/fast/1112198> ; # Semiconductors
   schema:about <http://id.worldcat.org/fast/1084679> ; # Pyrolysis
   schema:about <http://id.worldcat.org/fast/1118511> ; # Silane
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/131327464> ; # United States. Department of Energy.
   schema:creator <http://viaf.org/viaf/128939882> ; # Union Carbide Corporation.
   schema:datePublished "1979/9999" ;
   schema:datePublished "1979/" ;
   schema:description "Quarterly progress report, July -- Sept. 1979."@en ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/2517394968> ;
   schema:genre "National government publication"@en ;
   schema:genre "Government publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/2517394968#Series/doe_jpl> ; # DOE/JPL ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/2517394968#Series/drd> ; # DRD ;
   schema:name "Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process."@en ;
   schema:productID "6567723" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/6567723#PublicationEvent/washington_dept_of_energy_springfield_va_for_sale_by_the_national_technical_information_service_1979> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/2517394968#Agent/dept_of_energy> ; # Dept. of Energy
   schema:publisher <http://experiment.worldcat.org/entity/work/data/2517394968#Agent/for_sale_by_the_national_technical_information_service> ; # [For sale by the National Technical Information Service]
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/6567723> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/2517394968#Agent/dept_of_energy> # Dept. of Energy
    a bgn:Agent ;
   schema:name "Dept. of Energy" ;
    .

<http://experiment.worldcat.org/entity/work/data/2517394968#Agent/for_sale_by_the_national_technical_information_service> # [For sale by the National Technical Information Service]
    a bgn:Agent ;
   schema:name "[For sale by the National Technical Information Service]" ;
    .

<http://experiment.worldcat.org/entity/work/data/2517394968#Place/springfield_va> # Springfield, Va.
    a schema:Place ;
   schema:name "Springfield, Va." ;
    .

<http://experiment.worldcat.org/entity/work/data/2517394968#Series/doe_jpl> # DOE/JPL ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/6567723> ; # Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.
   schema:name "DOE/JPL ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/2517394968#Series/drd> # DRD ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/6567723> ; # Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.
   schema:name "DRD ;" ;
    .

<http://id.worldcat.org/fast/1084679> # Pyrolysis
    a schema:Intangible ;
   schema:name "Pyrolysis"@en ;
    .

<http://id.worldcat.org/fast/1112198> # Semiconductors
    a schema:Intangible ;
   schema:name "Semiconductors"@en ;
    .

<http://id.worldcat.org/fast/1118511> # Silane
    a schema:Intangible ;
   schema:name "Silane"@en ;
    .

<http://viaf.org/viaf/128939882> # Union Carbide Corporation.
    a schema:Organization ;
   schema:name "Union Carbide Corporation." ;
    .

<http://viaf.org/viaf/131327464> # United States. Department of Energy.
    a schema:Organization ;
   schema:name "United States. Department of Energy." ;
    .

<http://www.worldcat.org/title/-/oclc/6567723>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/6567723> ; # Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.
   schema:dateModified "2016-05-11" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .

<http://www.worldcat.org/title/-/oclc/6567723#PublicationEvent/washington_dept_of_energy_springfield_va_for_sale_by_the_national_technical_information_service_1979>
    a schema:PublicationEvent ;
   schema:location <http://experiment.worldcat.org/entity/work/data/2517394968#Place/springfield_va> ; # Springfield, Va.
   schema:location <http://experiment.worldcat.org/entity/work/data/2517394968#Place/washington> ; # Washington
   schema:organizer <http://experiment.worldcat.org/entity/work/data/2517394968#Agent/for_sale_by_the_national_technical_information_service> ; # [For sale by the National Technical Information Service]
   schema:organizer <http://experiment.worldcat.org/entity/work/data/2517394968#Agent/dept_of_energy> ; # Dept. of Energy
   schema:startDate "1979-" ;
    .


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