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Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process. Preview this item
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Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.

Author: Union Carbide Corporation.; United States. Department of Energy.
Publisher: [Washington] : Dept. of Energy ; [Springfield, Va.] : [For sale by the National Technical Information Service], 1979-
Series: DOE/JPL, 954334-12; DRD, no. SE-6
Edition/Format:   Print book : National government publication : English
Database:WorldCat
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Details

Material Type: Government publication, National government publication
Document Type: Book
All Authors / Contributors: Union Carbide Corporation.; United States. Department of Energy.
OCLC Number: 6567723
Notes: "DRL no. 81."
Contract no. NAS-7-100-954334.
Description: volumes : illustrations ; 28 cm.
Contents: Quarterly progress report, July --
Sept. 1979.
Series Title: DOE/JPL, 954334-12; DRD, no. SE-6
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