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Low Dielectric Constant Materials for IC Applications

Author: Paul S Ho; Jihperng Jim Leu; Wei William Lee
Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2003.
Series: Springer series in advanced microelectronics, 9.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Database:WorldCat
Summary:
Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Paul S Ho; Jihperng Jim Leu; Wei William Lee
ISBN: 9783642559082 3642559085
OCLC Number: 851748124
Description: 1 online resource (xix, 310 pages).
Contents: Overview on Low Dielectric Constant Materials for IC Applications --
Materials Issues and Characterization of Low-k Dielctric Materials --
Structure and Property Characterization of Low-k Dielectric Porous Thin Films Determined by X-Ray Reflactivity and Small-Angle Neutron Scattering --
Vapor Deposition of Low-k Polymeric Dielectrics --
Plasma Enhanced Chemical Vapor Deposition of FSG and a-C: Low-k Materials --
Porous Organosilicates for ON-Chip Applications: Dielectric Generational Extendibility by the Introduction of Porosity --
Metal/Polymer Interfacial Interactions --
Diffusion of Metals in Polymers and During Metal-Polymer Interface Formation --
Plasma Etching of Low Dielectric Constant Materials --
Integration of SiLK Semiconductor Dielectric.
Series Title: Springer series in advanced microelectronics, 9.
Responsibility: edited by Paul S. Ho, Jihperng Jim Leu, Wei William Lee.

Abstract:

Low dielectric constant materials are an important component of microelectronic devices. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials,  Read more...

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From the reviews:Praise for P.S. Ho, J. Leu, and W.W. Lee, Ed's, Low Dielectric Constant Materials for IC ApplicationsElectrical Insulation Magazine"Because this volume contains an excellent overview Read more...

 
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