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Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties

Author: Moonhor Ree; Jinhwan Yoon; Kyuyoung Heo
Publisher: New York : Nova Science Publishers, ©2010.
Series: Nanotechnology science and technology series.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Ree, Moonhor.
Low-k nanoporous interdielectrics.
New York : Nova Science Publishers, ©2010
(DLC) 2010016713
(OCoLC)612960158
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Moonhor Ree; Jinhwan Yoon; Kyuyoung Heo
ISBN: 9781617283185 1617283185
OCLC Number: 711000608
Description: 1 online resource (67 pages) : illustrations.
Series Title: Nanotechnology science and technology series.
Responsibility: Moonhor Ree, Jinhwan Yoon, and Kyuyoung Heo.

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