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Low temperature epitaxial growth of semiconductors

Author: Takashi Hariu
Publisher: Singapore ; Teaneck, NJ : World Scientific, ©1991.
Edition/Format:   Print book : EnglishView all editions and formats
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Genre/Form: Expitaxie
Document Type: Book
All Authors / Contributors: Takashi Hariu
ISBN: 9971508397 9789971508395
OCLC Number: 22813029
Description: vi, 343 pages : illustrations ; 23 cm
Contents: Theory of low temperature surface processes in epitaxy / H.J. Kreuzer --
Ion beam epitaxy / I. Yamada --
Plasma-assisted epitaxy / T. Hariu --
Photo-activated epitaxial growth / Yoshinobu Aoyagi, Takashi Meguro, and Sohachi Iwai --
Atomic layer epitaxy of GaAs and related compounds / Salah M. Bedair --
Low temperature growth of GaAs and AlGaAs by migration-enhanced epitaxy / Yoshiji Horikoshi, Minoru Kawashima, and Hiroshi Yamaguchi.
Responsibility: edited by Takashi Hariu.

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