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Magnetic and electronic films : microstructure, texture, and application to data storage : symposia held April 1-4, 2002, San Francisco, California, U.S.A.

Author: Patrick W DeHaven
Publisher: Warrendale, Pa. : Materials Research Society, ©2002.
Series: Materials Research Society symposia proceedings, v. 721.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Genre/Form: Conference papers and proceedings
Kongress
San Francisco (Calif., 2002)
Congresses
Additional Physical Format: Online version:
Magnetic and electronic films.
Warrendale, Pa. : Materials Research Society, ©2002
(OCoLC)605181156
Document Type: Book
All Authors / Contributors: Patrick W DeHaven
ISBN: 1558996575 9781558996571
OCLC Number: 50253227
Description: xiii, 306 pages : illustrations ; 24 cm.
Contents: Techniques and Applications --
Crystallographic Texture and Phase Metrology During Damascene Copper Processing / K.J. Kozaczek, P.W. DeHaven, K.P. Rodbell, S. Malhotra, D.S. Kurtz, R.I. Martin, P.R. Moran --
Accuracy and Reproducibility of X-ray Texture Measurements on Thin Films / Mark D. Vaudin, Glen R. Fox, Glen R. Kowach --
An In Situ Oblique-Incidence Optical Reflectance Difference Study of Co Electrodeposition on a Polycrystalline Au(111) Surface / J. Gray, W. Schwarzacher, X.D. Zhu --
Metal Films --
Texture Development and Twinning in Polycrystalline Gold Thin Films / Rachel E. Cefalu, Alexander H. King --
Molecular Dynamics Study of Cu Thin Film Deposition on [beta]-Ta / Peter Klaver, Barend J. Thijsse --
In Situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si / A.S. Ozcan, K.F. Ludwig Jr., C. Lavoie, C. Cabral Jr., J.M.E. Harper --
Copper Films --
Texture and Resistivity of Cu and Dilute Cu Alloy Films / K. Barmak, A. Gungor, A.D. Rollett, C. Cabral Jr., J.M.E. Harper --
Cu and Dilute Binary Cu(Ti), Cu(Sn) and Cu(Al) Thin Films: Texture, Grain Growth and Resistivity / A. Gungor, K. Barmak, A.D. Rollett, C. Cabral Jr., J.M.E. Harper --
Texture and Microtexture of Copper Films Prepared by the Self-Ion Assisted Deposition Technique on Barrier Layers With Different Structure / Oleg V. Kononenko, Victor N. Matveev, Andrei G. Vasiliev, Ivan Khorin, Tejodher Muppidi, David P. Field.
Series Title: Materials Research Society symposia proceedings, v. 721.
Responsibility: editors, Patrick W. DeHaven [and others].
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