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Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas

Author: Anant G Sabnis; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1994.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 2336.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Kongreß
Conference papers and proceedings
Austin (Tex., 1994)
Congresses
Additional Physical Format: Online version:
Manufacturing process control for microelectronic devices and circuits.
Bellingham, Wash. : SPIE, ©1994
(OCoLC)624400933
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Anant G Sabnis; Society of Photo-optical Instrumentation Engineers.
ISBN: 081941669X 9780819416698
OCLC Number: 31210133
Description: ix, 250 pages : illustrations ; 28 cm.
Contents: Advanced manufacturing process --
Computer-controlled manufacturing --
Sensor-based advanced manufacturing controls --
Advanced manufacturing control issues.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 2336.
Responsibility: Anant G. Sabnis, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.

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