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Mask and Lithography Conference (EMLC), 2009 25th European : date, 12-15 Jan. 2009.

Publisher: [Berlin?] : [VDE?], [2009]
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
OCLC Number: 773845850
Description: 1 online resource : illustrations
Other Titles: 2009 25th European Mask and Lithography Conference (EMLC)
EMLC 2009

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Primary Entity

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    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/1075480998#Place/berlin> ; # Berlin?
    schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
    schema:about <http://experiment.worldcat.org/entity/work/data/1075480998#Topic/microlithography> ; # Microlithography
    schema:about <http://experiment.worldcat.org/entity/work/data/1075480998#Topic/integrated_circuits_masks> ; # Integrated circuits--Masks
    schema:about <http://id.worldcat.org/fast/975575> ; # Integrated circuits--Masks
    schema:alternateName "EMLC 2009" ;
    schema:alternateName "2009 25th European Mask and Lithography Conference (EMLC)" ;
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    schema:creator <http://experiment.worldcat.org/entity/work/data/1075480998#Meeting/european_mask_and_lithography_conference_25th_2009_dresden_germany> ; # European Mask and Lithography Conference (25th : 2009 : Dresden, Germany)
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    schema:publisher <http://experiment.worldcat.org/entity/work/data/1075480998#Agent/vde> ; # [VDE?]
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Related Entities

<http://experiment.worldcat.org/entity/work/data/1075480998#Meeting/european_mask_and_lithography_conference_25th_2009_dresden_germany> # European Mask and Lithography Conference (25th : 2009 : Dresden, Germany)
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    schema:name "European Mask and Lithography Conference (25th : 2009 : Dresden, Germany)" ;
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<http://experiment.worldcat.org/entity/work/data/1075480998#Place/dresden_germany> # Dresden, Germany)
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<http://id.worldcat.org/fast/1019883> # Microlithography
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<http://id.worldcat.org/fast/975575> # Integrated circuits--Masks
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<http://www.worldcat.org/title/-/oclc/773845850>
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    schema:dateModified "2016-09-01" ;
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