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Materials and process characterization

Author: Norman G Einspruch; Graydon B Larrabee
Publisher: New York : Academic Press, 1983.
Series: VLSI electronics, v. 6.
Edition/Format:   Print book : EnglishView all editions and formats
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Document Type: Book
All Authors / Contributors: Norman G Einspruch; Graydon B Larrabee
ISBN: 0122341066 9780122341069
OCLC Number: 10947665
Description: xii, 601 pages : illustrations ; 24 cm.
Series Title: VLSI electronics, v. 6.
Responsibility: edited by Norman G. Einspruch, Graydon B. Larrabee.

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