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Materials science of microelectromechanical systems (MEMS) devices IV

Author: Arturo A Ayón
Publisher: Warrendale, Pa. : Materials Research Society, ©2002.
Series: Materials Research Society symposia proceedings, v. 687.
Edition/Format:   Print book : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Materials science of microelectromechanical systems (MEMS) devices IV.
Warrendale, Pa. : Materials Research Society, ©2002
(OCoLC)714674210
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Arturo A Ayón
ISBN: 1558996230 9781558996236
OCLC Number: 49894520
Notes: "Symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A."
Description: xi, 318 pages : illustrations ; 24 cm.
Contents: Microsensors for Automotive Applications --
Metrology and Test / Gottfried Flik, Heinz Eisenschmid and Carsten Raudzis / [et al.] --
Three-Dimensional Thermal Effects in MEMS Devices / Edward Van Keuren, John Currie and Matthew Nelson / [et al.] --
Piezoelectric Shear Mode Inkjet Actuator / Jurgen Brunahl, Alex M. Grishin and Sergey I. Khartsev / [et al.] --
Mechanisms of Fatigue in Polysilicon MEMS Structures / P. Shrotriya, S. Allameh and A. Butterwick / [et al.] --
Size Effects Determined From Tensile Tests of Perforated MEMS Scale Specimens / Ioannis Chasiotis and Wolfgang G. Knauss --
Plasticity Length Scale in LIGA Nickel MEMS Structures / J. Lou, P. Shrotriya and S. Allameh / [et al.] --
Bonding of Bulk Piezoelectric Material to Silicon Using a Gold-Tin Eutectic Bond / Kevin T. Turner, Richard Mlcak and David C. Roberts / [et al.] --
Electro-Mechanical Coupling and Power Generation in a PZT Micro-Engine / D. F. Bahr, K. R. Bruce and B. W. Olson / [et al.] --
Electrofluidic Assembly of Nanoelectromechanical Systems / Stephane Evoy, Ben Hailer and Martin Duemling / [et al.] --
Micromachined Nanoparticulate Ceramic Gas Sensor Array on MEMS Substrates / Martin Heule and Ludwig J. Gauckler --
Strength Analysis of a Micro-Rocket Combustion Chamber / Erin E. Noonan, Christopher S. Protz and Yoav P. Peles / [et al.] --
Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures / Edward S. Kolesar, Matthew D. Ruff and William E. Odom / [et al.] --
Ferromagnetic MiMnGa and CoNiGa Shape Memory Alloy Films / C. Craciunescu, Y. Kishi and L. Saraf / [et al.] --
Aluminum-Silicon and Gold-Silicon Eutectics: New Opportunities for MEMS Technologies / Ciprian Iliescu, Daniel P. Poenar and Jianmin Miao --
On the Unification of Material Strength Testing for MEMS Applications / Kuo-Shen Chen --
Charge Transport in Low Stress Si-Rich Silicon Nitride Thin Films / S. Habermehl and C. Carmignani --
Fabrication of 3D Feed Horn Shape MEMS Antenna Array using MRPBI (Mirror Reflected Parallel Beam Illuminator) System With an Ultra-Slow-Rotated and Inclined X-Y-Z Stage / Jong-Yeon Park, Kun-Tae Kim and Sung Moon / [et al.] --
Indentation Delamination and Indentation Fracture in ZnO/Si Systems / Bin Huang, Ming-Hao Zhao and Tong-Yi Zhang --
Fabrication of Piezoelectric Diaphragm Using Lead Zirconate Titanate (PZT) Films / E. Hong, S. V. Krishnaswamy and C. B. Freidhoff / [et al.] --
Neutron Irradiation-Induced Dimensional Changes in MEMS Glass Substrates / Clark L. Allred, Jeffrey T. Borenstein and Linn W. Hobbs --
Issues With Gold Electroplating for Microelectromechanical System Applications / Caroline A. Kondoleon and Thomas F. Marinis --
The Fabrication of Stainless Steel Parts for MEMS / Terry J. Garino, Alfredo Morales and Thomas Buchheit / [et al.] --
Thermal Losses and Temperature Measurement in SOI MEMS Heater / Nicholas Moelders, Irina Puscasu and Mark P. McNeal / [et al.] --
Fabrication of MEMS Tonpilz Transducers / Q. F. Zhou, L.-P. Wang and G. Gerber / [et al.] --
New MEMS Technology Using Multi-Layer NILC Poly-Si and NiSi Films / W. M. Cheung, C. F. Cheng and M. C. Poon / [et al.] --
Microstructuring of Silica and Polymethylmethacrylate Glasses by Femtosecond Irradiation for MEMS Applications / Saulius Juodkazis, Kazuhiko Yamasaki and Andrius Marcinkevicius / [et al.] --
Frictional Properties of Self-Assembled Alkylsilane Chains on Silica / M. Chandross, B. Park and M. Stevens / [et al.] --
Design and Modelling of a Fourier Spectrometer Based on Sampling a Standing Wave / D. Knipp, H. Stiebig and H.-J. Buchner / [et al.] --
Microfabricated Crevice Former with A Sensor Array / Xiaoyan Wang, Robert G. Kelly and Michael L. Reed --
Process Development of Silicon-Silicon Carbide Hybrid Micro-Engine Structures / Dongwon Choi, Robert J. Shinavski and Wayne S. Steffier / [et al.] --
Tensile Test of Bulk- and Surface-Micromachined 0.1 [mu]m Thick Silicon Film Using Electrostatic Force Grip System / Toshiyuki Tsuchiya, Jiro Sakata and M. Shikida / [et al.] --
Characteristics of Thick Sol-Gel Lead Zirconate Titanate Films for Angular Rate Sensor Application / S. H. Lee, T. Iijima and K. Nakamura / [et al.] --
Mechanical Properties of Thin Film Silicon Carbide / Kamili M. Jackson, Richard L. Edwards and Guy F. Dirras / [et al.] --
Add Ceramic "MEMS" to the Pallet of MicroSystems Technologies / David L. Wilcox, Sr, Jeremy W. Burdon and Rajnish Changrani / [et al.] --
Palladium Based Micro-Membrane Hydrogen Gas Separator-Reactor in a Miniature Fuel Processor for Micro Fuel Cells / Sooraj V. Karnik, Miltiadis K. Hatalis and Mayuresh V. Kothare --
The Materials Science of "Permeable Polysilicon" Thin Films / George M. Dougherty, Timothy Sands and Albert P. Pisano --
Materials Issues in the Application of Silicon Nitride Films in Silicon MEMS / David F. Moore, Roger M. Bostock and Paul Boyle / [et al.] --
Mechanical Properties of 0.1 micron Thick SIMOX Film Measured Using On-Chip Tensile Test System / J. Amano, T. Ando and M. Shikida / [et al.] --
Silicon Microfabrication: Laser Ablation vs. Inductively Coupled Plasma (ICP) Etch / Megan M. Owens, Joseph W. Soucy and Thomas F. Marinis --
A Constitutive Model for the Mechanical Behavior of Single Crystal Silicon at Elevated Temperature / H.-S. Moon, L. Anand and S. M. Spearing --
Fracture Strength of Polysilicon Thin Films at Stress Concentrations / J. Bagdahn and W. N. Sharpe, Jr. --
Mechanical Testing of Free-Standing Thin Films / W. N. Sharpe, Jr. and K. J. Hemker --
On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon / C. L. Muhlstein, E. A. Stach and R. O. Ritchie.
Series Title: Materials Research Society symposia proceedings, v. 687.
Responsibility: editors, Arturo A. Ayón [and others].
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