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Materials science of microelectromechanical systems (MEMS) devices

Author: A H Heuer; S Joshua Jacobs
Publisher: Warrendale, Pa. : Materials Research Society, ©1999.
Series: Materials Research Society symposia proceedings, v. 546.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Materials science of microelectromechanical systems (MEMS) devices.
Warrendale, Pa. : Materials Research Society, ©1999
(OCoLC)714761845
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: A H Heuer; S Joshua Jacobs
ISBN: 1558994521 9781558994522
OCLC Number: 42649737
Description: ix, 246 pages : illustrations ; 24 cm.
Series Title: Materials Research Society symposia proceedings, v. 546.
Responsibility: editors, Arthur H. Heuer, S. Joshua Jacobs.

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Primary Entity

<http://www.worldcat.org/oclc/42649737> # Materials science of microelectromechanical systems (MEMS) devices
    a schema:Book, schema:CreativeWork ;
   library:oclcnum "42649737" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/341649776#Place/warrendale_pa> ; # Warrendale, Pa.
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/pau> ;
   schema:about <http://dewey.info/class/621.381/e21/> ;
   schema:about <http://id.worldcat.org/fast/1019745> ; # Microelectromechanical systems
   schema:about <http://id.worldcat.org/fast/1019771> ; # Microelectronics--Materials
   schema:about <http://experiment.worldcat.org/entity/work/data/341649776#Topic/microelectronics_materials> ; # Microelectronics--Materials
   schema:about <http://experiment.worldcat.org/entity/work/data/341649776#Topic/microelectromechanical_systems> ; # Microelectromechanical systems
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/204097278> ; # S Joshua Jacobs
   schema:contributor <http://viaf.org/viaf/108709364> ; # Arthur H. Heuer
   schema:copyrightYear "1999" ;
   schema:datePublished "1999" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/341649776> ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:genre "Conference publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/341649776#Series/materials_research_society_symposium_proceedings> ; # Materials Research Society symposium proceedings ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/341649776#Series/materials_research_society_symposia_proceedings> ; # Materials Research Society symposia proceedings ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/714761845> ;
   schema:name "Materials science of microelectromechanical systems (MEMS) devices"@en ;
   schema:productID "42649737" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/42649737#PublicationEvent/warrendale_pa_materials_research_society_1999> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/341649776#Agent/materials_research_society> ; # Materials Research Society
   schema:workExample <http://worldcat.org/isbn/9781558994522> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/42649737> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/341649776#Agent/materials_research_society> # Materials Research Society
    a bgn:Agent ;
   schema:name "Materials Research Society" ;
    .

<http://experiment.worldcat.org/entity/work/data/341649776#Place/warrendale_pa> # Warrendale, Pa.
    a schema:Place ;
   schema:name "Warrendale, Pa." ;
    .

<http://experiment.worldcat.org/entity/work/data/341649776#Series/materials_research_society_symposia_proceedings> # Materials Research Society symposia proceedings ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/42649737> ; # Materials science of microelectromechanical systems (MEMS) devices
   schema:name "Materials Research Society symposia proceedings ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/341649776#Series/materials_research_society_symposium_proceedings> # Materials Research Society symposium proceedings ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/42649737> ; # Materials science of microelectromechanical systems (MEMS) devices
   schema:name "Materials Research Society symposium proceedings ;" ;
    .

<http://id.worldcat.org/fast/1019745> # Microelectromechanical systems
    a schema:Intangible ;
   schema:name "Microelectromechanical systems"@en ;
    .

<http://id.worldcat.org/fast/1019771> # Microelectronics--Materials
    a schema:Intangible ;
   schema:name "Microelectronics--Materials"@en ;
    .

<http://viaf.org/viaf/108709364> # Arthur H. Heuer
    a schema:Person ;
   schema:birthDate "1936" ;
   schema:familyName "Heuer" ;
   schema:givenName "Arthur H." ;
   schema:givenName "A. H." ;
   schema:name "Arthur H. Heuer" ;
    .

<http://viaf.org/viaf/204097278> # S Joshua Jacobs
    a schema:Person ;
   schema:familyName "Jacobs" ;
   schema:givenName "S. Joshua" ;
   schema:name "S Joshua Jacobs" ;
    .

<http://worldcat.org/isbn/9781558994522>
    a schema:ProductModel ;
   schema:isbn "1558994521" ;
   schema:isbn "9781558994522" ;
    .

<http://www.worldcat.org/oclc/714761845>
    a schema:CreativeWork ;
   rdfs:label "Materials science of microelectromechanical systems (MEMS) devices." ;
   schema:description "Online version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/42649737> ; # Materials science of microelectromechanical systems (MEMS) devices
    .


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