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Materials science of thin films : deposition and structure

Author: Milton Ohring
Publisher: San Diego, CA : Academic Press, 2002.
Edition/Format:   Print book : English : 2nd edView all editions and formats
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This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the  Read more...

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Additional Physical Format: Online version:
Ohring, Milton, 1936-
Materials science of thin films.
San Diego, CA : Academic Press, 2002
(OCoLC)162575935
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Milton Ohring
ISBN: 0125249756 9780125249751 9780080491783 0080491782
OCLC Number: 48463437
Description: xxi, 794 pages : illustrations ; 24 cm
Contents: A review of materials science --
Vacuum science and technology --
Thin-film evaporation processes --
Discharges, plasmas, and ion-surface interactions --
Plasma and ion beam processing of thin films --
Chamical vapor deposition --
Substrate surfaces and thin-film nucleation --
Epitaxy --
Film structure --
Characterixation of thin films and surfaces --
Interdiffusion, reactions, and transformations in thin films --
Mechanical properties of thin films.
Responsibility: Milton Ohring.
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"There is a need for new, comprehensive texts and references in [advanced materials processing] and its subdisciplines. This has been especially true for thin films, and of the several recent books Read more...

 
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