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MEMS : a practical guide to design, analysis, and applications

Author: Jan G Korvink
Publisher: Norwich, NY : Andrew, 2011.
Series: Micro-electro-mechanical systems
Edition/Format:   Print book : English : [Repr.]View all editions and formats
Publication:MEMS.
Summary:

If you are a product development engineer or manager, the decision to design an MEMS device implies having an application and market. This book explores MEMS possibilities and covers devices such as  Read more...

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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Jan G Korvink
ISBN: 9780815514978 0815514972
OCLC Number: 772652893
Notes: 2006.
Description: XXV, 965 Seiten : Illustrationen, Diagramme.
Contents: IntroductionMicrotransducer OperationMaterial Properties: Measurement and DataMEMS and MEMS SimulationSystem-Level Simulation of MicrosystemsThermal Based SensorsPhoton DetectorsFree-Space Optical MEMSIntegrated Micro-OpticsMagnetic MicrosensorsMechanical MicrosensorsSemiconductor-Based Chemical MicrosensorsMicrofluidicsBiomedical MicrosystemsMicroactuatorsMicromachining TechnologyInterface Circuitry and MicrosystemsIndex
Series Title: Micro-electro-mechanical systems
Other Titles: Micro-Electro-Mechanical Systems
Responsibility: ed. by Jan G. Korvink ...

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"The editors have done an excellent job in providing a handbook that will help companies maintain their competitive advantage now and into the future. u Wolfgang Menz, The Albert Ludwig University

 
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