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MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

Author: Henry HelvajianSiegfried W JansonFranz LärmerSociety of Photo-optical Instrumentation Engineers.United States. Defense Advanced Research Projects Agency.All authors
Publisher: Bellingham, Wash., USA : SPIE, ©2001.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4559.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: (DLC) 2001279011
(OCoLC)48547410
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Henry Helvajian; Siegfried W Janson; Franz Lärmer; Society of Photo-optical Instrumentation Engineers.; United States. Defense Advanced Research Projects Agency.; Semiconductor Equipment and Materials International.; SPIE Digital Library.
ISBN: 0819442879 9780819442871
OCLC Number: 53836400
Reproduction Notes: Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Description: xxvii, 190 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4559.
Responsibility: Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) [and others].

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