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MEMS materials and processes handbook

Author: Reza Ghodssi; Pinyen Lin
Publisher: New York ; London : Springer, 2010. ©2011
Series: MEMS reference shelf.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
MEMS materials and processes handbook.
New York ; London : Springer, 2010
(OCoLC)587110610
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Reza Ghodssi; Pinyen Lin
ISBN: 9780387473185 0387473181
OCLC Number: 719362668
Description: 1 online resource (xxxv, 1187 pages) : illustrations (some color).
Contents: The MEMS Design Process / Tina L. Lamers and Beth L. Pruitt --
Additive Processes for Semiconductors and Dielectric Materials / Chris Zorman, Robert C. Roberts, and Li Chen --
Additive Processes for Metals / David P. Arnold, Monika Saumer, and Yong-Kyu Yoon --
Additive Processes for Polymeric Materials / Ellis Meng, Xin Zhang, and William Benard --
Additive Processes for Piezoelectric Materials : Piezoelectric MEMS / Ronald G. Polcawich, Jeffrey S. Pulskamp --
Materials and Processes in Shape Memory Alloy / Takashi Mineta and Yoichi Haga --
Dry Etching for Micromachining Applications / Srinivas Tadigadapa and Franz Lärmer --
MEMS Wet-Etch Processes and Procedures / David W. Burns --
MEMS Lithography and Micromachining Techniques / Daniel R. Hines, Nathan P. Siwak, Lance A. Mosher, and Reza Ghodssi --
Doping Processes for MEMS / Alan D. Raisanen --
Wafer Bonding / Shawn J. Cunningham and Mario Kupnik --
MEMS Packaging Materials / Ann Garrison Darrin and Robert Osiander --
Surface Treatment and Planarization / Pinyen Lin, Roya Maboudian, Carlo Carraro, Fan-Gang Tseng, Pen-Cheng Wang, and Yongqing Lan --
MEMS Process Integration / Michael A. Huff, Stephen F. Bart, and Pinyen Lin.
Series Title: MEMS reference shelf.
Other Titles: Micro electro mechanical systems materals and processes handbook
Responsibility: edited by Reza Ghodssi, Pinyen Lin.

Abstract:

This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs  Read more...

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From the reviews:"In this handbook, editors Ghodssi (Univ. of Maryland, College Park) and Lin (Touch Micro-system Technology, Taiwan) have essentially organized the collective knowledge of decades of Read more...

 
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